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Objective

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100X/0.90 EUV Objective

Based on our experience in designing and processing a 266nm lens, we have also designed a 193nm extreme ultraviolet imaging lens with the parameters shown in the table.

(We also accept clients' commissions to design optical systems for other spectra, such as 157nm, 121nm, etc.)

Introduction
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This 193nm lens is our latest design. Gradually put into production and push towards the market. We also accept customized non-standard optical systems from customers.


放大倍數(shù) Magnification	規(guī)格型號 Model	數(shù)值孔徑 NA	工作距離 WD(mm)	焦距 f’ (mm)	分辨率 R (μm) 266nm	焦深 DF (μm) 266nm	物方視場 on object (mm)	像方視場 on image (mm)	螺紋尺寸 Screw
10x	EUV010X	0.40	20.00	20.0	0.54	2.95	20.00	20	0.8”
20x	EUV020X	0.50	20.00	10.0	0.45	2.05	10.00	20	0.8”
40x	EUV040X	0.60	10.00	4.0	0.38	1.50	0.50	20	0.8”
50x	EUV057X	0.70	5.26	4.0	0.27	0.73	0.40	20	0.8”
50x	EUV058X	0.80	10.00	4.0	0.23	0.54	0.40	20	0.8”
80x	EUV080X	0.90	4.85	2.5	0.18	0.20	0.25	20	0.8”
100X	EUV175X	0.75	5.14	2.0	0.24	0.40	0.20	20	0.8”
100X	EUV100X	0.90	3.54	2.0	0.18	0.20	0.20	20	0.8”